Experimental Apparatus

Microwave Assisted Plasma CVD

NIRIM Type : x 2

Microwave Power: Max 1200W(2.45GHz)

Gas: Methane and Hydrogen

DC Power Supply: Max 300V(100mA)

ASTeX Type : x 1

Microwave Power: unknown(2.45GHz)

Gas: Methane and Hydrogen

Ion-Beam Deposition

Barna Type? Low Energy Ion Beam: x 1

Gas: Methane and Hydrogen

Ion Energy: 3-10keV

Ion Current: unknown