Experimental Apparatus


Microwave Assisted Plasma CVD
NIRIM Type : x 2
Microwave Power: Max 1200W(2.45GHz)
Gas: Methane and Hydrogen
DC Power Supply: Max 300V(100mA)
ASTeX Type : x 1
Microwave Power: unknown(2.45GHz)
Gas: Methane and Hydrogen
Ion-Beam Deposition
Barna Type? Low Energy Ion Beam: x 1
Gas: Methane and Hydrogen
Ion Energy: 3-10keV
Ion Current: unknown