Experimental Apparatus
- Microwave Assisted Plasma CVD
- NIRIM Type : x 2
- Microwave Power: Max 1200W(2.45GHz)
- Gas: Methane and Hydrogen
- DC Power Supply: Max 300V(100mA)
- ASTeX Type : x 1
- Microwave Power: unknown(2.45GHz)
- Gas: Methane and Hydrogen
- Ion-Beam Deposition
- Barna Type? Low Energy Ion Beam: x 1
- Gas: Methane and Hydrogen
- Ion Energy: 3-10keV
- Ion Current: unknown